LM Guide Models for Special Environments LM Guide Oil-Free for Special Environments Model SR-MS

These models are operable in various environments at pressures between atmospheric pressure and vacuum. They area capable of withstanding baking temperatures up to 200°C.

Sizes : 15,20

Handling Precautions

Types

Highlight feature tags

Sizes : 15,20

Features

Structure and Features

Structural Characteristics

Uses stainless steel
All components are composed of materials for special environments such as stainless steel.
Degreased and cleaned
Special solvent is used to de-grease this model.
Does not use grease
Use of highly reliable dry lubricant S-compound film for stainless steel balls achieves grease-free lubrication.

Greatest Advantage

These models area suitable for applications where the vacuum level reaches 10^‒6 Pa and chemical contamination (gaseous contamination such as organic matter and moisture) is not allowed.¹ They can be used at temperatures up to 150°C (200°C short term).

What is Dry Lubrication S-Compound Film?

Dry Lubrication S-Compound Film is a fully dry lubricant developed for use under atmospheric to high-vacuum environments.
It has superior characteristics in load carrying capacity, wear resistance, and sealability compared to other lubrication systems.

Item	No vacuum		Vacuum		Service environment
Item	Friction coefficient	Wear resistance	Friction coefficient	Wear resistance	Service environment
Molybdenum Disulfide (hexagonal form)	0.05 to 0.25	Adequate	0.02 to 0.1	Adequate	Vacuum
Silver (soft metal)	Not applicable	Not applicable	0.1 to 0.3	Adequate	Vacuum
DLC (diamond-like carbon)	0.06 to 0.15	Superior	0.3 to 0.5	Adequate	No vacuum
Dry Lubrication S-Compound Film	0.02 to 0.05	Good	0.01 to 0.03	Good	No vacuum, Vacuum

Outgassing in Vacuum Environments

No outgassing was observed from the S-compound in a high-vacuum environment.

Durability

The oil-free LM Guide demonstrates stable fatigue life.

Oil-Free LM Guide Applications

Industry	Equipment	Advantages of the oil-free LM Guide
Semiconductor / FPD manufacturing machine	Exposure machines, organic EL manufacturing machines, Ion injection machines, Lithography systems	Low (organic) outgassing Operable at high temperatures (up to 150℃)
Analyzers and inspection equipment	Mass spectrometers and X-ray inspection systems	Usable in high-vacuum environments Stable rolling resistance even at low speeds
Space industry	Artificial satellites and robot arms	Low volatility and loss in outer space Stable rolling resistance even at low temperatures

Nominal Life Equation for the Oil-Free LM Guide

L_10m ：Nominal life　　　（km）
F₀ 　：Permissible load　　　（N）
P_C 　：Calculated load　　　（N）
α　：Modified factor

Note: The life here means the service life of the S film based on wear.
Since the service life of the S film may vary according to the environment or the operating conditions. Customers are encouraged to evaluate and validate the life under the service environment and operating conditions at their facilities.