Catalog, 2D-CAD, 3D-CAD,
Manual List

Fix Stages

Reading the Model Configuration*Scroll to confirm.
TTHK CHUO LTravel direction SStage type - TStage type 40stage surface 51Design symbol FXFix stage
  L…Linear S…Single   T…Thin type 25…□25 51  
R…Rotary D…Double P…permeation type 40…□40 52
T…Tilt V…Z lift No Symbol…Normal type 60…□60  

*The Design symbol of Thin type or Goniometer type (the center of rotation is 40mm) is “52”.

Line Up

X Stage

X Stage
  • X Axis
TLS-1251FX
(Stage surface:11.8㎜×24.8㎜ Travel amount:±1.5mm)
TLS-2551FX
(Stage surface:25㎜×25㎜ Travel amount:±3mm)
TLS-4051FX
(Stage surface:40㎜×40㎜ Travel amount:±3.5mm)
TLS-6051FX
(Stage surface:60㎜×60㎜ Travel amount:±5.5mm)

XY Stage

XY Stage
  • XY Axis
TLD-1251FX
(Stage surface:11.8㎜×24.8㎜ Travel amount:±1.5mm)
TLD-2551FX
(Stage surface:25㎜×25㎜ Travel amount:±3mm)
TLD-4051FX
(Stage surface:40㎜×40㎜ Travel amount:±3.5mm)
TLD-6051FX
(Stage surface:60㎜×60㎜ Travel amount:±5.5mm)

Thin Type X Stage

Thin Type X Stage
  • X Axis
TLS-T4052FX
(Stage surface:40㎜×40㎜ Travel amount:±3.5mm)
TLS-T6052FX
(Stage surface:60㎜×60㎜ Travel amount:±5.5mm)

Thin Type XY Stage

Thin Type XY Stage
  • XY Axis
TLD-T4052FX
(Stage surface:40㎜×40㎜ Travel amount:±3.5mm)
TLD-T6052FX
(Stage surface:60㎜×60㎜ Travel amount:±5.5mm)

Goniometer Stage

Goniometer Stage
  • Tilt Single
TTS-2551FX
(Stage surface:25㎜×25㎜ Travel amount:±2°)
TTS-2552FX
(Stage surface:25㎜×25㎜ Travel amount:±2°)
TTS-4051FX
(Stage surface:40㎜×40㎜ Travel amount:±3°)
TTS-4052FX
(Stage surface:40㎜×40㎜ Travel amount:±3°)
TTS-6051FX
(Stage surface:60㎜×60㎜ Travel amount:±3°)
TTS-6052FX
(Stage surface:60㎜×60㎜ Travel amount:±3°)

2-Axis Goniometer Stage

2-Axis Goniometer Stage
  • Tilt Double
TTD-2551FX
(Stage surface:25㎜×25㎜ Travel amount:±2°)
TTD-4051FX
(Stage surface:40㎜×40㎜ Travel amount:±3°)
TTD-6051FX
(Stage surface:60㎜×60㎜ Travel amount:±3°)

Transmission Rotary Stage

Transmission Rotary Stage
  • Rotation
TRS-P4051FX
(Stage surface:40㎜×40㎜ Travel amount:±10°)
TRS-P6051FX
(Stage surface:60㎜×60㎜ Travel amount:±10°)

Z Lift Stage

Z Axis
  • Z Lift Stage
TLV-2551FX
(Stage surface:25㎜×25㎜ Travel amount:0〜1mm)
TLV-4051FX
(Stage surface:40㎜×40㎜ Travel amount:0〜1mm)
TLV-6051FX
(Stage surface:60㎜×60㎜ Travel amount:0〜1mm)

Transmission Type X Stage

Transmission Type X Stage
  • X Axis
TLS-P4051FX
(Stage surface:40㎜×40㎜ Travel amount:±3.5mm)
TLS-P6051FX
(Stage surface:60㎜×60㎜ Travel amount:±5.5mm)

Transmission Type XY Stage

Transmission Type XY Stage
  • XY Axis
TLD-P4051FX
(Stage surface:40㎜×40㎜ Travel amount:±3.5mm)
TLD-P6051FX
(Stage surface:60㎜×60㎜ Travel amount:±5.5mm)

Rotary Stage

Transmission Type XY Stage
  • Rotation
TRS-P2551FX
(Stage surface:25㎜×25㎜ Travel amount:±5°)

2-Axis Tilt Stage for Alignment

Transmission Type XY Stage
  • Tilt Double
TTD-A4051FX
(Stage surface:40㎜×40㎜ Travel amount:±1.5°)
TTD-A6051FX
(Stage surface:60㎜×60㎜ Travel amount:±1.5°)

Manual Stages

High-Grade Aluminum Stages

X Stage

X Stage
  • X Axis
TLS-3047-C1
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Standard type, Center position, Standard micrometer
TLS-3047-CR1
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Symmetrical type, Center position, Standard micrometer
TLS-3047-C8
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLS-3047-CR8
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLS-3047-S1
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Standard type, Side position, Standard micrometer
TLS-3047-SR1
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Symmetrical type, Side position, Standard micrometer
TLS-3047-S8
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLS-3047-SR8
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLS-4047-C1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLS-4047-CR1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLS-4047-C6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLS-4047-CR6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLS-4047-C8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLS-4047-CR8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLS-4047-S1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLS-4047-SR1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLS-4047-S6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLS-4047-SR6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLS-4047-S8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLS-4047-SR8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLS-5047-C1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLS-5047-CR1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLS-5047-C6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLS-5047-CR6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLS-5047-C8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLS-5047-CR8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLS-5047-S1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLS-5047-SR1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLS-5047-S6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLS-5047-SR6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLS-5047-S8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLS-5047-SR8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLS-6047-C1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLS-6047-CR1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLS-6047-C6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLS-6047-CR6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLS-6047-C8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLS-6047-CR8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLS-6047-S1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLS-6047-SR1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLS-6047-S6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLS-6047-SR6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLS-6047-S8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLS-6047-SR8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLS-7047-C1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLS-7047-CR1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLS-7047-C6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLS-7047-CR6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLS-7047-C8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLS-7047-CR8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLS-7047-S1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLS-7047-SR1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLS-7047-S6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLS-7047-SR6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLS-7047-S8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLS-7047-SR8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer

XY Stage

XY Stage
  • XY Axis
TLD-3047-C1
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Standard type, Center position, Standard micrometer
TLD-3047-CR1
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Symmetrical type, Center position, Standard micrometer
TLD-3047-C8
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLD-3047-CR8
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLD-3047-S1
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Standard type, Side position, Standard micrometer
TLD-3047-SR1
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Symmetrical type, Side position, Standard micrometer
TLD-3047-S8
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLD-3047-SR8
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLD-4047-C1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLD-4047-CR1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLD-4047-C6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLD-4047-CR6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLD-4047-C8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLD-4047-CR8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLD-4047-S1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLD-4047-SR1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLD-4047-S6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLD-4047-SR6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLD-4047-S8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLD-4047-SR8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLD-5047-C1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLD-5047-CR1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLD-5047-C6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLD-5047-CR6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLD-5047-C8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLD-5047-CR8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLD-5047-S1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLD-5047-SR1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLD-5047-S6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLD-5047-SR6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLD-5047-S8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLD-5047-SR8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLD-6047-C1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLD-6047-CR1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLD-6047-C6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLD-6047-CR6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLD-6047-C8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLD-6047-CR8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLD-6047-S1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLD-6047-SR1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLD-6047-S6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLD-6047-SR6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLD-6047-S8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLD-6047-SR8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLD-7047-C1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLD-7047-CR1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLD-7047-C6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLD-7047-CR6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLD-7047-C8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLD-7047-CR8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLD-7047-S1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLD-7047-SR1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLD-7047-S6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLD-7047-SR6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLD-7047-S8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLD-7047-SR8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer

Z Stage

Z Stage
  • Z Axis
TLZ-3047-C1
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Standard type, Center position, Standard micrometer
TLZ-3047-CR1
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Symmetrical type, Center position, Standard micrometer
TLZ-3047-C8
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLZ-3047-CR8
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLZ-3047-S1
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Standard type, Side position, Standard micrometer
TLZ-3047-SR1
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Symmetrical type, Side position, Standard micrometer
TLZ-3047-S8
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLZ-3047-SR8
(Stage surface:30㎜×30㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLZ-4047-C1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLZ-4047-CR1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLZ-4047-C6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLZ-4047-CR6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLZ-4047-C8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLZ-4047-CR8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLZ-4047-S1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLZ-4047-SR1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLZ-4047-S6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLZ-4047-SR6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLZ-4047-S8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLZ-4047-SR8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLZ-5047-C1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLZ-5047-CR1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLZ-5047-C6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLZ-5047-CR6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLZ-5047-C8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLZ-5047-CR8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLZ-5047-S1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLZ-5047-SR1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLZ-5047-S6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLZ-5047-SR6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLZ-5047-S8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLZ-5047-SR8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLZ-6047-C1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLZ-6047-CR1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLZ-6047-C6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLZ-6047-CR6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLZ-6047-C8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLZ-6047-CR8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLZ-6047-S1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLZ-6047-SR1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLZ-6047-S6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLZ-6047-SR6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLZ-6047-S8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLZ-6047-SR8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLZ-7047-C1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLZ-7047-CR1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLZ-7047-C6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLZ-7047-CR6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLZ-7047-C8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLZ-7047-CR8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLZ-7047-S1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLZ-7047-SR1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLZ-7047-S6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLZ-7047-SR6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLZ-7047-S8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLZ-7047-SR8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer

Rotary Stage

Rotary Stage
  • Rotation
TRS-4012
(Stage surface:φ40㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
Standard micrometer
TRS-4012-R
(Stage surface:φ40㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
reversed micrometer position, Standard micrometer
TRS-5012
(Stage surface:φ50㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
Standard micrometer
TRS-5012-R
(Stage surface:φ50㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
reversed micrometer position, Standard micrometer
TRS-6012
(Stage surface:φ60㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
Standard micrometer
TRS-6012-R
(Stage surface:φ60㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
reversed micrometer position, Standard micrometer
TRS-6042
(Stage surface:φ60㎜ Travel amount: Coarse movement 360°、fine movement ±4°)
Standard micrometer
TRS-6042-R
(Stage surface:φ60㎜ Travel amount: Coarse movement 360°、fine movement ±4°)
reversed micrometer position, Standard micrometer
TRS-7012
(Stage surface:φ70㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
Standard micrometer
TRS-7012-R
(Stage surface:φ70㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
reversed micrometer position, Standard micrometer
TRS-7042
(Stage surface:φ70㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
Standard micrometer
TRS-7042-R
(Stage surface:φ70㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
reversed micrometer position, Standard micrometer

XYZ Stage

XYZ Stage
  • XYZ Axis
TLT-3047-S1
(Stage surface:30㎜×30㎜ Travel amount: XY axes ±3mm、Z axes 0〜5mm)
Standard type, Side position, Standard micrometer
TLT-3047-SR1
(Stage surface:30㎜×30㎜ Travel amount: XY axes ±3mm、Z axes 0〜5mm)
Symmetrical type, Side position, Standard micrometer
TLT-4047-S1
(Stage surface:40㎜×40㎜ Travel amount: XY axes ±6.5mm、Z axes 0〜10mm)
Standard type, Side position, Standard micrometer
TLT-4047-SR1
(Stage surface:40㎜×40㎜ Travel amount: XY axes ±6.5mm、Z axes 0〜10mm)
Symmetrical type, Side position, Standard micrometer
TLT-5047-S1
(Stage surface:50㎜×50㎜ Travel amount: XY axes ±6.5mm、Z axes 0〜10mm)
Standard type, Side position, Standard micrometer
TLT-5047-SR1
(Stage surface:50㎜×50㎜ Travel amount: XY axes ±6.5mm、Z axes 0〜10mm)
Symmetrical type, Side position, Standard micrometer
TLT-6047-S1
(Stage surface:60㎜×60㎜ Travel amount: XY axes ±6.5mm、Z axes 0〜10mm)
Standard type, Side position, Standard micrometer
TLT-6047-SR1
(Stage surface:60㎜×60㎜ Travel amount: XY axes ±6.5mm、Z axes 0〜10mm)
Symmetrical type, Side position, Standard micrometer
TLT-7047-S1
(Stage surface:70㎜×70㎜ Travel amount: XY axes ±6.5mm、Z axes 0〜10mm)
Standard type, Side position, Standard micrometer
TLT-7047-SR1
(Stage surface:70㎜×70㎜ Travel amount: XY axes ±6.5mm、Z axes 0〜10mm)
Symmetrical type, Side position, Standard micrometer

XYZ Rotary Stage

XYZ Rotary Stage
  • XYZ Axis
  • Rotation
TTR-3047-S1
(Stage surface:φ30㎜ Travel amount: XY axes ±3mm、Z axes 0〜5mm、 Rotary axes Coarse movement 360°、fine movement ±5°)
Standard type, Side position, Standard micrometer
TTR-3047-SR1
(Stage surface:φ30㎜ Travel amount: XY axes ±3mm、Z axes 0〜5mm、 Rotary axes Coarse movement 360°、fine movement ±5°)
Symmetrical type, Side position, Standard micrometer
TTR-4047-S1
(Stage surface:φ40㎜ Travel amount: XY axes ±6.5mm、Z axes 0〜10mm、 Rotary axes Coarse movement 360°、fine movement ±5°)
Standard type, Side position, Standard micrometer
TTR-4047-SR1
(Stage surface:φ40㎜ Travel amount: XY axes ±6.5mm、Z axes 0〜10mm、 Rotary axes Coarse movement 360°、fine movement ±5°)
Symmetrical type, Side position, Standard micrometer
TTR-5047-S1
(Stage surface:φ50㎜ Travel amount: XY axes ±6.5mm、Z axes 0〜10mm、 Rotary axes Coarse movement 360°、fine movement ±5°)
Standard type, Side position, Standard micrometer
TTR-5047-SR1
(Stage surface:φ50㎜ Travel amount: XY axes ±6.5mm、Z axes 0〜10mm、 Rotary axes Coarse movement 360°、fine movement ±5°)
Symmetrical type, Side position, Standard micrometer
TTR-6047-S1
(Stage surface:φ60㎜ Travel amount: XY axes ±6.5mm、Z axes 0〜10mm、 Rotary axes Coarse movement 360°、fine movement ±5°)
Standard type, Side position, Standard micrometer
TTR-6047-SR1
(Stage surface:φ60㎜ Travel amount: XY axes ±6.5mm、Z axes 0〜10mm、 Rotary axes Coarse movement 360°、fine movement ±5°)
Symmetrical type, Side position, Standard micrometer
TTR-7047-S1
(Stage surface:φ70㎜ Travel amount: XY axes ±6.5mm、Z axes 0〜10mm、 Rotary axes Coarse movement 360°、fine movement ±5°)
Standard type, Side position, Standard micrometer
TTR-7047-SR1
(Stage surface:φ70㎜ Travel amount: XY axes ±6.5mm、Z axes 0〜10mm、 Rotary axes Coarse movement 360°、fine movement ±5°)
Symmetrical type, Side position, Standard micrometer

High-Grade Stages (Stainless Steel)

X Stage

X Stage
  • X Axis
TLS-4042-C1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLS-4042-CR1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLS-4042-C6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLS-4042-CR6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLS-4042-C8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLS-4042-CR8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLS-4042-S1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLS-4042-SR1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLS-4042-S6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLS-4042-SR6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLS-4042-S8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLS-4042-SR8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLS-4042-S1-2
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer, Operator side plate clamp
TLS-4042-SR1-2
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer, Operator side plate clamp
TLS-4042-S6-2
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw, Operator side plate clamp
TLS-4042-SR6-2
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw, Operator side plate clamp
TLS-4042-S8-2
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer, Operator side plate clamp
TLS-4042-SR8-2
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer, Operator side plate clamp
TLS-5042-C1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLS-5042-CR1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLS-5042-C6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLS-5042-CR6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLS-5042-C8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLS-5042-CR8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLS-5042-S1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLS-5042-SR1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLS-5042-S6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLS-5042-SR6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLS-5042-S8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLS-5042-SR8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLS-5042-S1-2
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer, Operator side plate clamp
TLS-5042-SR1-2
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer, Operator side plate clamp
TLS-5042-S6-2
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw, Operator side plate clamp
TLS-5042-SR6-2
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw, Operator side plate clamp
TLS-5042-S8-2
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer, Operator side plate clamp
TLS-5042-SR8-2
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer, Operator side plate clamp
TLS-6042-C1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLS-6042-CR1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLS-6042-C6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLS-6042-CR6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLS-6042-C7
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Center position, Digimatic micrometer
TLS-6042-CR7
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Digimatic micrometer
TLS-6042-C8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLS-6042-CR8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLS-6042-S1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLS-6042-SR1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLS-6042-S6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLS-6042-SR6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLS-6042-S7
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Digimatic micrometer
TLS-6042-S8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLS-6042-SR8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLS-6042-S1-2
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer, Operator side plate clamp
TLS-6042-SR1-2
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer, Operator side plate clamp
TLS-6042-S6-2
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw, Operator side plate clamp
TLS-6042-SR6-2
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw, Operator side plate clamp
TLS-6042-S7-2
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Digimatic micrometr, Operator side plate clamp
TLS-6042-S8-2
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer, Operator side plate clamp
TLS-6042-SR8-2
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer, Operator side plate clamp
TLS-7042-C1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLS-7042-CR1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLS-7042-C6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLS-7042-CR6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLS-7042-C7
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Center position, Digimatic micrometer
TLS-7042-CR7
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Digimatic micrometer
TLS-7042-C8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLS-7042-CR8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLS-7042-S1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLS-7042-SR1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLS-7042-S6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLS-7042-SR6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLS-7042-S7
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Digimatic micrometer
TLS-7042-S8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLS-7042-SR8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLS-7042-S1-2
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer, Operator side plate clamp
TLS-7042-SR1-2
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer, Operator side plate clamp
TLS-7042-S6-2
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw, Operator side plate clamp
TLS-7042-SR6-2
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw, Operator side plate clamp
TLS-7042-S7-2
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Digimatic micrometr, Operator side plate clamp
TLS-7042-S8-2
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer, Operator side plate clamp
TLS-7042-SR8-2
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer, Operator side plate clamp

XY Stage

XY Stage
  • XY Axis
TLD-4042-C1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLD-4042-CR1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLD-4042-C6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLD-4042-CR6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLD-4042-C8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLD-4042-CR8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLD-4042-S1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLD-4042-SR1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLD-4042-S6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLD-4042-SR6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLD-4042-S8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLD-4042-SR8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLD-4042-S1-2
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer, Operator side plate clamp
TLD-4042-SR1-2
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer, Operator side plate clamp
TLD-4042-S6-2
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw, Operator side plate clamp
TLD-4042-SR6-2
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw, Operator side plate clamp
TLD-4042-S8-2
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer, Operator side plate clamp
TLD-4042-SR8-2
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer, Operator side plate clamp
TLD-5042-C1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLD-5042-CR1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLD-5042-C6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLD-5042-CR6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLD-5042-C8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLD-5042-CR8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLD-5042-S1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLD-5042-SR1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLD-5042-S6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLD-5042-SR6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLD-5042-S8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLD-5042-SR8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLD-5042-S1-2
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer, Operator side plate clamp
TLD-5042-SR1-2
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer, Operator side plate clamp
TLD-5042-S6-2
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw, Operator side plate clamp
TLD-5042-SR6-2
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw, Operator side plate clamp
TLD-5042-S8-2
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer, Operator side plate clamp
TLD-5042-SR8-2
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer, Operator side plate clamp
TLD-6042-C1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLD-6042-CR1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLD-6042-C6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLD-6042-CR6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLD-6042-C7
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Center position, Digimatic micrometer
TLD-6042-CR7
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Digimatic micrometer
TLD-6042-C8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLD-6042-CR8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLD-6042-S1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLD-6042-SR1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLD-6042-S6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLD-6042-SR6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLD-6042-S7
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Digimatic micrometer
TLD-6042-S8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLD-6042-SR8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLD-6042-S1-2
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer, Operator side plate clamp
TLD-6042-SR1-2
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer, Operator side plate clamp
TLD-6042-S6-2
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw, Operator side plate clamp
TLD-6042-SR6-2
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw, Operator side plate clamp
TLD-6042-S7-2
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Digimatic micrometr, Operator side plate clamp
TLD-6042-S8-2
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer, Operator side plate clamp
TLD-6042-SR8-2
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer, Operator side plate clamp
TLD-7042-C1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLD-7042-CR1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLD-7042-C6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLD-7042-CR6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLD-7042-C7
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Center position, Digimatic micrometer
TLD-7042-CR7
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Digimatic micrometer
TLD-7042-C8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLD-7042-CR8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLD-7042-S1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLD-7042-SR1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLD-7042-S6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLD-7042-SR6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLD-7042-S7
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Digimatic micrometer
TLD-7042-S8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLD-7042-SR8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLD-7042-S1-2
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer, Operator side plate clamp
TLD-7042-SR1-2
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer, Operator side plate clamp
TLD-7042-S6-2
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw, Operator side plate clamp
TLD-7042-SR6-2
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw, Operator side plate clamp
TLD-7042-S7-2
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Digimatic micrometr, Operator side plate clamp
TLD-7042-S8-2
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer, Operator side plate clamp
TLD-7042-SR8-2
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer, Operator side plate clamp

Z Stage

Z Stage
  • Z Axis
TLZ-4042-C1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLZ-4042-CR1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLZ-4042-C6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLZ-4042-CR6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLZ-4042-C8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLZ-4042-CR8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLZ-4042-S1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLZ-4042-SR1
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLZ-4042-S6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLZ-4042-SR6
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLZ-4042-S8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLZ-4042-SR8
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLZ-4042-S1-2
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer, Operator side plate clamp
TLZ-4042-SR1-2
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer, Operator side plate clamp
TLZ-4042-S6-2
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw, Operator side plate clamp
TLZ-4042-SR6-2
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw, Operator side plate clamp
TLZ-4042-S8-2
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer, Operator side plate clamp
TLZ-4042-SR8-2
(Stage surface:40㎜×40㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer, Operator side plate clamp
TLZ-5042-C1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLZ-5042-CR1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLZ-5042-C6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLZ-5042-CR6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLZ-5042-C8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLZ-5042-CR8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLZ-5042-S1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLZ-5042-SR1
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLZ-5042-S6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLZ-5042-SR6
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLZ-5042-S8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLZ-5042-SR8
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLZ-5042-S1-2
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer, Operator side plate clamp
TLZ-5042-SR1-2
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer, Operator side plate clamp
TLZ-5042-S6-2
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw, Operator side plate clamp
TLZ-5042-SR6-2
(Stage surface:50㎜×50㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw, Operator side plate clamp
TLZ-5042-S8-2
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer, Operator side plate clamp
TLZ-5042-SR8-2
(Stage surface:50㎜×50㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer, Operator side plate clamp
TLZ-6042-C1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLZ-6042-CR1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLZ-6042-C6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLZ-6042-CR6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLZ-6042-C7
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Center position, Digimatic micrometer
TLZ-6042-CR7
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Digimatic micrometer
TLZ-6042-C8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLZ-6042-CR8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLZ-6042-S1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLZ-6042-SR1
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLZ-6042-S6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLZ-6042-SR6
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLZ-6042-S7
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Digimatic micrometer
TLZ-6042-S8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLZ-6042-SR8
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLZ-6042-S1-2
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer, Operator side plate clamp
TLZ-6042-SR1-2
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer, Operator side plate clamp
TLZ-6042-S6-2
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw, Operator side plate clamp
TLZ-6042-SR6-2
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw, Operator side plate clamp
TLZ-6042-S7-2
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Digimatic micrometr, Operator side plate clamp
TLZ-6042-S8-2
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer, Operator side plate clamp
TLZ-6042-SR8-2
(Stage surface:60㎜×60㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer, Operator side plate clamp
TLZ-7042-C1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Center position, Standard micrometer
TLZ-7042-CR1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Standard micrometer
TLZ-7042-C6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Center position, Feed screw
TLZ-7042-CR6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Feed screw
TLZ-7042-C7
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Center position, Digimatic micrometer
TLZ-7042-CR7
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Center position, Digimatic micrometer
TLZ-7042-C8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Standard type, Center position, Fine pitch micrometer
TLZ-7042-CR8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Symmetrical type, Center position, Fine pitch micrometer
TLZ-7042-S1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer
TLZ-7042-SR1
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer
TLZ-7042-S6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLZ-7042-SR6
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw
TLZ-7042-S7
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Digimatic micrometer
TLZ-7042-S8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer
TLZ-7042-SR8
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer
TLZ-7042-S1-2
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Standard micrometer, Operator side plate clamp
TLZ-7042-SR1-2
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Standard micrometer, Operator side plate clamp
TLZ-7042-S6-2
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw, Operator side plate clamp
TLZ-7042-SR6-2
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Symmetrical type, Side position, Feed screw, Operator side plate clamp
TLZ-7042-S7-2
(Stage surface:70㎜×70㎜ Travel amount:±6.5mm)
Standard type, Side position, Digimatic micrometr, Operator side plate clamp
TLZ-7042-S8-2
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Standard type, Side position, Fine pitch micrometer, Operator side plate clamp
TLZ-7042-SR8-2
(Stage surface:70㎜×70㎜ Travel amount:±3mm)
Symmetrical type, Side position, Fine pitch micrometer, Operator side plate clamp

Z Lift Stage

Z Lift Stage
  • Z Axis
TLV-3047-1
(Stage surface:30㎜×30㎜ Travel amount: 0〜5mm)
Standard type, Standard micrometer
TLV-4042-1
(Stage surface:40㎜×40㎜ Travel amount: 0〜10mm)
Standard type, Standard micrometer
TLV-4042-6
(Stage surface:40㎜×40㎜ Travel amount: 0〜10mm) Standard type, Feed screw
TLV-4042-8
(Stage surface:40㎜×40㎜ Travel amount: 0〜6mm)
Standard type, Fine pitch micrometer
TLV-5042-1
(Stage surface:50㎜×50㎜ Travel amount: 0〜10mm)
Standard type, Standard micrometer
TLV-5042-6
(Stage surface:50㎜×50㎜ Travel amount: 0〜10mm) Standard type, Feed screw
TLV-5042-8
(Stage surface:50㎜×50㎜ Travel amount: 0〜6mm)
Standard type, Fine pitch micrometer
TLV-6042-1
(Stage surface:60㎜×60㎜ Travel amount: 0〜10mm)
Standard type, Standard micrometer
TLV-6042-6
(Stage surface:60㎜×60㎜ Travel amount: 0〜10mm) Standard type, Feed screw
TLV-6042-7
(Stage surface:60㎜×60㎜ Travel amount: 0〜10mm)
Standard type, Digimatic micrometer
TLV-6042-8
(Stage surface:60㎜×60㎜ Travel amount: 0〜6mm)
Standard type, Fine pitch micrometer
TLV-7042-1
(Stage surface:70㎜×70㎜ Travel amount: 0〜10mm)
Standard type, Standard micrometer
TLV-7042-6
(Stage surface:70㎜×70㎜ Travel amount: 0〜10mm) Standard type, Feed screw
TLV-7042-7
(Stage surface:70㎜×70㎜ Travel amount: 0〜10mm)
Standard type, Digimatic micrometer
TLV-7042-8
(Stage surface:70㎜×70㎜ Travel amount: 0〜6mm)
Standard type, Fine pitch micrometer

Thin VB Stages

X, XY Stage

X, XY Stage
  • X Axis
  • XY Axis
TLS-T4039-S6A
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLS-T6039-S6A
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLD-T4039-S6A
(Stage surface:40㎜×40㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw
TLD-T6039-S6A
(Stage surface:60㎜×60㎜ Travel amount:±6.5mm)
Standard type, Side position, Feed screw

Slim Stages, Cross Roller Stages

X, XY Stage

X, XY Stage
  • X Axis
  • XY Axis
TLS-947-C1
(Stage surface:90㎜×90㎜ Travel amount:±7.5mm)
Standard type, Center position, Standard micrometer
TLS-947-S1
(Stage surface:90㎜×90㎜ Travel amount:±7.5mm)
Standard type, Side position, Standard micrometer
TLS-947-R1
(Stage surface:90㎜×90㎜ Travel amount:±7.5mm)
Reversed micrometer position, Standard micrometer
TLS-149-C1
(Stage surface:125㎜×125㎜ Travel amount:±12.5mm)
Standard type, Center position, Standard micrometer
TLS-149-S1
(Stage surface:125㎜×125㎜ Travel amount:±12.5mm)
Standard type, Side position, Standard micrometer
TLS-149-R1
(Stage surface:125㎜×125㎜ Travel amount:±12.5mm)
Reversed micrometer position, Standard micrometer
TLS-149-C7
(Stage surface:125㎜×125㎜ Travel amount:±12.5mm)
Standard type, Center position, Digimatic micrometer
TLS-149-S7
(Stage surface:125㎜×125㎜ Travel amount:±12.5mm)
Standard type, Side position, Digimatic micrometer
TLS-241-C1
(Stage surface:125㎜×150㎜ Travel amount:±25mm)
Standard type, Center position, Standard micrometer
TLS-241-S1
(Stage surface:125㎜×150㎜ Travel amount:±25mm)
Standard type, Side position, Standard micrometer
TLS-243-C7
(Stage surface:125㎜×150㎜ Travel amount:±25mm)
Standard type, Center position, Digimatic micrometer
TLS-242
(Stage surface:130㎜×200㎜ Travel amount:±50mm) Center position, Manual feed
TLS-242-MSC
(Stage surface:130㎜×200㎜ Travel amount:±50mm)
Manual feed, Magnetic scale or display unit included
TLD-947-C1
(Stage surface:90㎜×90㎜ Travel amount:±7.5mm)
Standard type, Center position, Standard micrometer
TLD-947-S1
(Stage surface:90㎜×90㎜ Travel amount:±7.5mm)
Standard type, Side position, Standard micrometer
TLD-947-R1
(Stage surface:90㎜×90㎜ Travel amount:±7.5mm)
Reversed micrometer position, Standard micrometer
TLD-149-C1
(Stage surface:125㎜×125㎜ Travel amount:±12.5mm)
Standard type, Center position, Standard micrometer
TLD-149-S1
(Stage surface:125㎜×125㎜ Travel amount:±12.5mm)
Standard type, Side position, Standard micrometer
TLD-149-R1
(Stage surface:125㎜×125㎜ Travel amount:±12.5mm)
Reversed micrometer position, Standard micrometer
TLD-149-C7
(Stage surface:125㎜×125㎜ Travel amount:±12.5mm)
Standard type, Center position, Digimatic micrometer
TLD-149-S7
(Stage surface:125㎜×125㎜ Travel amount:±12.5mm)
Standard type, Side position, Digimatic micrometer
TLD-241-C1
(Stage surface:125㎜×150㎜ Travel amount:±25mm)
Standard type, Center position, Standard micrometer
TLD-241-S1
(Stage surface:125㎜×150㎜ Travel amount:±25mm)
Standard type, Side position, Standard micrometer
TLD-243-C7
(Stage surface:125㎜×150㎜ Travel amount:±25mm)
Standard type, Center position, Digimatic micrometer
TLD-242
(Stage surface:130㎜×200㎜ Travel amount:±50mm) Center position, Manual feed
TLD-242-MSC
(Stage surface:130㎜×200㎜ Travel amount:±50mm)
Center position, Manual feed, Magnetic scale or display unit included

Z Stage

Z Stage
  • Z Axis
TLZ-947-S1
(Stage surface:90㎜×90㎜ Travel amount:±7.5mm)
Standard type, Side position, Standard micrometer
TLZ-947-R1
(Stage surface:90㎜×90㎜ Travel amount:±7.5mm)
Reversed micrometer position, Standard micrometer

XYZ Stage

XYZ Stage
  • XYZ Axis
TLT-907-S1
(Stage surface:90㎜×90㎜ Travel amount: XY axes ±7.5mm、Z axes 0〜10mm)
Standard type, Side position, Standard micrometer
TLT-907-R1
(Stage surface:90㎜×90㎜ Travel amount: XY axes ±7.5mm、Z axes 0〜10mm)
Reversed micrometer position, Standard micrometer
TLT-140-S1
(Stage surface:125㎜×125㎜ Travel amount: XY axes ±12.5mm、Z axes 0〜10mm)
Standard type, Side position, Standard micrometer
TLT-140-R1
(Stage surface:125㎜×125㎜ Travel amount: XY axes ±12.5mm、Z axes 0〜10mm)
Reversed micrometer position, Standard micrometer

XYZ Rotary Stage

XYZ Rotary Stage
  • XYZ Axis
  • Rotation
TTR-907-S1
(Stage surface:Φ90㎜ Travel amount: XY axes ±7.5mm、Z axes 0〜10mm、 Rotary Coarse movement 360° fine movement ±5°)
Standard type, Side position, Standard micrometer
TTR-907-R1
(Stage surface:Φ90㎜ Travel amount: XY axes ±7.5mm、Z axes 0〜10mm、 Rotary Coarse movement 360° fine movement ±5°)
Reversed micrometer position, Standard micrometer
TTR-101-S1
(Stage surface:Φ125㎜ Travel amount: XY axes ±12.5mm、Z axes 0〜10mm、 Rotary Coarse movement 360° fine movement ±5°)
Standard type, Side position, Standard micrometer
TTR-101-R1
(Stage surface:Φ125㎜ Travel amount: XY axes ±12.5mm、Z axes 0〜10mm、 Rotary Coarse movement 360° fine movement ±5°)
Reversed micrometer position, Standard micrometer

Z Lift Stage

Z Lift Stage
  • Z Axis
TLV-147-1
(Stage surface:125㎜×125㎜ Travel amount: 0〜10mm)
Standard type, Standard micrometer
TLV-147-6
(Stage surface:125㎜×125㎜ Travel amount: 0〜10mm)
Standard type, Feed screw
TLV-147-7
(Stage surface:125㎜×125㎜ Travel amount: 0〜10mm)
Standard type, Digimatic micrometer

Rack & Pinion Stages

X Stage

X Stage
  • X Axis
TLS-412
(Stage surface:40㎜×40㎜ Travel amount:±10mm) Single knob
TLS-412W
(Stage surface:40㎜×40㎜ Travel amount:±10mm) Double knob
TLS-412S
(Stage surface:40㎜×40㎜ Travel amount:±10mm)
Single coarse/fine movement knob
TLS-412WS
(Stage surface:40㎜×40㎜ Travel amount:±10mm)
Double coarse/fine movement knob
TLS-612
(Stage surface:40㎜×60㎜ Travel amount:±15mm) Single knob
TLS-612W
(Stage surface:40㎜×60㎜ Travel amount:±15mm) Double knob
TLS-612S
(Stage surface:40㎜×60㎜ Travel amount:±15mm) Single coarse/fine movement knob
TLS-612WS
(Stage surface:40㎜×60㎜ Travel amount:±15mm)
Double coarse/fine movement knob
TLS-912
(Stage surface:40㎜×90㎜ Travel amount:±30mm) Single knob
TLS-912W
(Stage surface:40㎜×90㎜ Travel amount:±30mm) Double knob
TLS-912S
(Stage surface:40㎜×90㎜ Travel amount:±30mm)
Single coarse/fine movement knob
TLS-912WS
(Stage surface:40㎜×90㎜ Travel amount:±30mm)
Double coarse/fine movement knob
TLS-112
(Stage surface:40㎜×140㎜ Travel amount:±50mm) Single knob
TLS-112W
(Stage surface:40㎜×140㎜ Travel amount:±50mm) Double knob
TLS-112S
(Stage surface:40㎜×140㎜ Travel amount:±50mm)
Single coarse/fine movement knob
TLS-112WS
(Stage surface:40㎜×140㎜ Travel amount:±50mm)
Double coarse/fine movement knob

XY Stage

XY Stage
  • XY Axis
TLD-412
(Stage surface:40㎜×40㎜ Travel amount:±10mm) Single knob
TLD-412W
(Stage surface:40㎜×40㎜ Travel amount:±10mm) Double knob
TLD-412S
(Stage surface:40㎜×40㎜ Travel amount:±10mm)
Single coarse/fine movement knob
TLD-412WS
(Stage surface:40㎜×40㎜ Travel amount:±10mm)
Double coarse/fine movement knob
TLD-612
(Stage surface:40㎜×60㎜ Travel amount:±15mm) Single knob
TLD-612W
(Stage surface:40㎜×60㎜ Travel amount:±15mm) Double knob
TLD-612S
(Stage surface:40㎜×60㎜ Travel amount:±15mm)
Single coarse/fine movement knob
TLD-612WS
(Stage surface:40㎜×60㎜ Travel amount:±15mm)
Double coarse/fine movement knob
TLD-912
(Stage surface:40㎜×90㎜ Travel amount:±30mm) Single knob
TLD-912W
(Stage surface:40㎜×90㎜ Travel amount:±30mm) Double knob
TLD-912S
(Stage surface:40㎜×90㎜ Travel amount:±30mm)
Single coarse/fine movement knob
TLD-912WS
(Stage surface:40㎜×90㎜ Travel amount:±30mm)
Double coarse/fine movement knob
TLD-112
(Stage surface:40㎜×140㎜ Travel amount:±50mm) Single knob
TLD-112W
(Stage surface:40㎜×140㎜ Travel amount:±50mm) Double knob
TLD-112S
(Stage surface:40㎜×140㎜ Travel amount:±50mm)
Single coarse/fine movement knob
TLD-112WS
(Stage surface:40㎜×140㎜ Travel amount:±50mm)
Double coarse/fine movement knob

Z Stage

Z Stage
  • Z Axis
TLV-412L
(Stage surface:40㎜×40㎜ Travel amount:10mm) Low bracket, Single knob
TLV-412WL
(Stage surface:40㎜×40㎜ Travel amount:10mm) Low bracket, Double knob
TLV-412SL
(Stage surface:40㎜×60㎜ Travel amount:10mm)
Low bracket, Single coarse/fine movement knob
TLV-412WSL
(Stage surface:40㎜×60㎜ Travel amount:10mm)
Low bracket, Double coarse/fine movement knob
TLV-412
(Stage surface:40㎜×40㎜ Travel amount:±10mm) Single knob
TLV-412W
(Stage surface:40㎜×40㎜ Travel amount:±10mm) Double knob
TLV-412S
(Stage surface:40㎜×60㎜ Travel amount:±10mm) Single coarse/fine movement knob
TLV-412WS
(Stage surface:40㎜×60㎜ Travel amount:±10mm)
Double coarse/fine movement knob
TLV-612L
(Stage surface:40㎜×60㎜ Travel amount:15mm) Low bracket, Single knob
TLV-612WL
(Stage surface:40㎜×60㎜ Travel amount:15mm) Low bracket, Double knob
TLV-612SL
(Stage surface:40㎜×60㎜ Travel amount:15mm)
Low bracket, Single coarse/fine movement knob
TLV-612WSL
(Stage surface:40㎜×60㎜ Travel amount:15mm)
Low bracket, Double coarse/fine movement knob
TLV-612
(Stage surface:40㎜×60㎜ Travel amount:±15mm) Single knob
TLV-612W
(Stage surface:40㎜×60㎜ Travel amount:±15mm) Double knob
TLV-612S
(Stage surface:40㎜×60㎜ Travel amount:±15mm) Single coarse/fine movement knob
TLV-612WS
(Stage surface:40㎜×60㎜ Travel amount:±15mm)
Double coarse/fine movement knob
TLV-912L
(Stage surface:40㎜×90㎜ Travel amount:30mm) Low bracket, Single knob
TLV-912WL
(Stage surface:40㎜×90㎜ Travel amount:30mm) Low bracket, Double knob
TLV-912SL
(Stage surface:40㎜×90㎜ Travel amount:30mm)
Low bracket, Single coarse/fine movement knob
TLV-912WSL
(Stage surface:40㎜×90㎜ Travel amount:30mm)
Low bracket, Double coarse/fine movement knob
TLV-912
(Stage surface:40㎜×90㎜ Travel amount:±30mm) Single knob
TLV-912W
(Stage surface:40㎜×90㎜ Travel amount:±30mm) Double knob
TLV-912S
(Stage surface:40㎜×90㎜ Travel amount:±30mm) Single coarse/fine movement knob
TLV-912WS
(Stage surface:40㎜×90㎜ Travel amount:±30mm)
Double coarse/fine movement knob
TLV-112L
(Stage surface:40㎜×140㎜ Travel amount:50mm) Low bracket, Single knob
TLV-112WL
(Stage surface:40㎜×140㎜ Travel amount:50mm) Low bracket, Double knob
TLV-112SL
(Stage surface:40㎜×140㎜ Travel amount:50mm)
Low bracket, Single coarse/fine movement knob
TLV-112WSL
(Stage surface:40㎜×140㎜ Travel amount:50mm)
Low bracket, Double coarse/fine movement knob
TLV-112
(Stage surface:40㎜×140㎜ Travel amount:±50mm) Single knob
TLV-112W
(Stage surface:40㎜×140㎜ Travel amount:±50mm) Double knob
TLV-112S
(Stage surface:40㎜×140㎜ Travel amount:±50mm)
Single coarse/fine movement knob
TLV-112WS
(Stage surface:40㎜×140㎜ Travel amount:±50mm)
Double coarse/fine movement knob

XZ Stage

XZ Stage
  • XZ Axis
TLM-412L
(Stage surface:40㎜×40㎜ Travel amount: X axes ±10mm、Z axes 10mm) Low bracket, Single knob
TLM-412WL
(Stage surface:40㎜×40㎜ Travel amount: X axes ±10mm、Z axes 10mm) Low bracket, Double knob
TLM-412SL
(Stage surface:40㎜×40㎜ Travel amount: X axes ±10mm、Z axes 10mm)
Low bracket, Single coarse/fine movement knob
TLM-412WSL
(Stage surface:40㎜×40㎜ Travel amount: X axes ±10mm、Z axes 10mm)
Low bracket, Double coarse/fine movement knob
TLM-412
(Stage surface:40㎜×40㎜ Travel amount: ±10mm) Single knob
TLM-412W
(Stage surface:40㎜×40㎜ Travel amount: ±10mm) Double knob
TLM-412S
(Stage surface:40㎜×40㎜ Travel amount: ±10mm) Single coarse/fine movement knob
TLM-412WS
(Stage surface:40㎜×40㎜ Travel amount: ±10mm)
Double coarse/fine movement knob
TLM-612L
(Stage surface:40㎜×60㎜ Travel amount: X axes ±15mm、Z axes 15mm) Low bracket, Single knob
TLM-612WL
(Stage surface:40㎜×60㎜ Travel amount: X axes ±15mm、Z axes 15mm) Low bracket, Double knob
TLM-612SL
(Stage surface:40㎜×60㎜ Travel amount: X axes ±15mm、Z axes 15mm)
Low bracket, Single coarse/fine movement knob
TLM-612WSL
(Stage surface:40㎜×60㎜ Travel amount: X axes ±15mm、Z axes 15mm)
Low bracket, Double coarse/fine movement knob
TLM-612
(Stage surface:40㎜×60㎜ Travel amount: ±15mm) Single knob
TLM-612W
(Stage surface:40㎜×60㎜ Travel amount: ±15mm) Double knob
TLM-612S
(Stage surface:40㎜×60㎜ Travel amount: ±15mm) Single coarse/fine movement knob
TLM-612WS
(Stage surface:40㎜×60㎜ Travel amount: ±15mm)
Double coarse/fine movement knob
TLM-912L
(Stage surface:40㎜×90㎜ Travel amount: X axes ±30mm、Z axes 30mm) Low bracket, Single knob
TLM-912WL
(Stage surface:40㎜×90㎜ Travel amount: X axes ±30mm、Z axes 30mm) Low bracket, Double knob
TLM-912SL
(Stage surface:40㎜×90㎜ Travel amount: X axes ±30mm、Z axes 30mm)
Low bracket, Single coarse/fine movement knob
TLM-912WSL
(Stage surface:40㎜×90㎜ Travel amount: X axes ±30mm、Z axes 30mm)
Low bracket, Double coarse/fine movement knob
TLM-912
(Stage surface:40㎜×90㎜ Travel amount: ±30mm) Single knob
TLM-912W
(Stage surface:40㎜×90㎜ Travel amount: ±30mm) Double knob
TLM-912S
(Stage surface:40㎜×90㎜ Travel amount: ±30mm) Single coarse/fine movement knob
TLM-912WS
(Stage surface:40㎜×90㎜ Travel amount: ±30mm)
Double coarse/fine movement knob
TLM-112L
(Stage surface:40㎜×140㎜ Travel amount: X axes ±50mm、Z axes 50mm) Low bracket, Single knob
TLM-112WL
(Stage surface:40㎜×140㎜ Travel amount: X axes ±50mm、Z axes 50mm) Low bracket, Double knob
TLM-112SL
(Stage surface:40㎜×140㎜ Travel amount: X axes ±50mm、Z axes 50mm)
Low bracket, Single coarse/fine movement knob
TLM-112WSL
(Stage surface:40㎜×140㎜ Travel amount: X axes ±50mm、Z axes 50mm)
Low bracket, Double coarse/fine movement knob
TLM-112
(Stage surface:40㎜×140㎜ Travel amount: ±50mm) Single knob
TLM-112W
(Stage surface:40㎜×140㎜ Travel amount: ±50mm) Double knob
TLM-112S
(Stage surface:40㎜×140㎜ Travel amount: ±50mm)
Single coarse/fine movement knob
TLM-112WS
(Stage surface:40㎜×140㎜ Travel amount: ±50mm)
Double coarse/fine movement knob

XYZ Stage

XYZ Stage
  • XYZ Axis
TLT-412L
(Stage surface:40㎜×40㎜ Travel amount: XY axes ±10mm、Z axes 10mm) Low bracket, Single knob
TLT-412WL
(Stage surface:40㎜×40㎜ Travel amount: XY axes ±10mm、Z axes 10mm) Low bracket, Double knob
TLT-412SL
(Stage surface:40㎜×40㎜ Travel amount: XY axes ±10mm、Z axes 10mm)
Low bracket, Single coarse/fine movement knob
TLT-412WSL
(Stage surface:40㎜×40㎜ Travel amount: XY axes ±10mm、Z axes 10mm)
Low bracket, Double coarse/fine movement knob
TLT-412
(Stage surface:40㎜×40㎜ Travel amount: ±10mm) Single knob
TLT-412W
(Stage surface:40㎜×40㎜ Travel amount: ±10mm) Double knob
TLT-412S
(Stage surface:40㎜×40㎜ Travel amount: ±10mm) Single coarse/fine movement knob
TLT-412WS
(Stage surface:40㎜×40㎜ Travel amount: ±10mm)
Double coarse/fine movement knob
TLT-612L
(Stage surface:40㎜×60㎜ Travel amount: XY axes ±15mm、Z axes 15mm) Low bracket, Single knob
TLT-612WL
(Stage surface:40㎜×60㎜ Travel amount: XY axes ±15mm、Z axes 15mm) Low bracket, Double knob
TLT-612SL
(Stage surface:40㎜×60㎜ Travel amount: XY axes ±15mm、Z axes 15mm)
Low bracket, Single coarse/fine movement knob
TLT-612WSL
(Stage surface:40㎜×60㎜ Travel amount: XY axes ±15mm、Z axes 15mm)
Low bracket, Double coarse/fine movement knob
TLT-612
(Stage surface:40㎜×60㎜ Travel amount: ±15mm) Single knob
TLT-612W
(Stage surface:40㎜×60㎜ Travel amount: ±15mm) Double knob
TLT-612S
(Stage surface:40㎜×60㎜ Travel amount: ±15mm) Single coarse/fine movement knob
TLT-612WS
(Stage surface:40㎜×60㎜ Travel amount: ±15mm)
(Double coarse/fine movement knob
TLT-912L
(Stage surface:40㎜×90㎜ Travel amount: XY axes ±30mm、Z axes 30mm) Low bracket, Single knob
TLT-912WL
(Stage surface:40㎜×90㎜ Travel amount: XY axes ±30mm、Z axes 30mm) Low bracket, Double knob
TLT-912SL
(Stage surface:40㎜×90㎜ Travel amount: XY axes ±30mm、Z axes 30mm)
Low bracket, Single coarse/fine movement knob
TLT-912WSL
(Stage surface:40㎜×90㎜ Travel amount: XY axes ±30mm、Z axes 30mm)
Low bracket, Double coarse/fine movement knob
TLT-912
(Stage surface:40㎜×90㎜ Travel amount: ±30mm) Single knob
TLT-912W
(Stage surface:40㎜×90㎜ Travel amount: ±30mm) Double knob
TLT-912S
(Stage surface:40㎜×90㎜ Travel amount: ±30mm) Single coarse/fine movement knob
TLT-912WS
(Stage surface:40㎜×90㎜ Travel amount: ±30mm)
Double coarse/fine movement knob
TLT-112L
(Stage surface:40㎜×140㎜ Travel amount: XY axes ±50mm、Z axes 50mm) Low bracket, Single knob
TLT-112WL
(Stage surface:40㎜×140㎜ Travel amount: XY axes ±50mm、Z axes 50mm) Low bracket, Double knob
TLT-112SL
(Stage surface:40㎜×140㎜ Travel amount: XY axes ±50mm、Z axes 50mm)
Low bracket, Single coarse/fine movement knob
TLT-112WSL
(Stage surface:40㎜×140㎜ Travel amount: XY axes ±50mm、Z axes 50mm)
Low bracket, Double coarse/fine movement knob
TLT-112
(Stage surface:40㎜×140㎜ Travel amount: ±50mm) Single knob
TLT-112W
(Stage surface:40㎜×140㎜ Travel amount: ±50mm) Double knob
TLT-112S
(Stage surface:40㎜×140㎜ Travel amount: ±50mm)
Single coarse/fine movement knob
TLT-112WS
(Stage surface:40㎜×140㎜ Travel amount: ±50mm)
Double coarse/fine movement knob

Long-Distance Stage

Long-Distance Stage
  • X Axis
TLS-414L1
(Stage surface:40㎜×40㎜ Travel amount: 60mm) Rail length 100 mm, Single knob
TLS-414WL1
(Stage surface:40㎜×40㎜ Travel amount: 60mm) Rail length 100 mm, Double knob
TLS-414L2
(Stage surface:40㎜×40㎜ Travel amount: 160mm) Rail length 200 mm, Single knob
TLS-414WL2
(Stage surface:40㎜×40㎜ Travel amount: 160mm) Rail length 200 mm, Double knob
TLS-414L3
(Stage surface:40㎜×40㎜ Travel amount: 260mm) Rail length 300 mm, Single knob
TLS-414WL3
(Stage surface:40㎜×40㎜ Travel amount: 260mm) Rail length 300 mm, Double knob
TLS-414L4
(Stage surface:40㎜×40㎜ Travel amount: 360mm) Rail length 400 mm, Single knob
TLS-414WL4
(Stage surface:40㎜×40㎜ Travel amount: 360mm) Rail length 400 mm, Double knob
TLS-414L5
(Stage surface:40㎜×40㎜ Travel amount: 460mm) Rail length 500 mm, Single knob
TLS-414WL5
(Stage surface:40㎜×40㎜ Travel amount: 460mm) Rail length 500 mm, Double knob
TLS-414SL1
(Stage surface:40㎜×40㎜ Travel amount: 60mm)
Rail length 100 mm, Single coarse/fine movement knob
TLS-414WSL1
(Stage surface:40㎜×40㎜ Travel amount: 60mm)
Rail length 100 mm, Double coarse/fine movement knob
TLS-414SL2
(Stage surface:40㎜×40㎜ Travel amount: 160mm)
Rail length 200 mm, Single coarse/fine movement knob
TLS-414WSL2
(Stage surface:40㎜×40㎜ Travel amount: 160mm)
Rail length 200 mm, Double coarse/fine movement knob
TLS-414SL3
(Stage surface:40㎜×40㎜ Travel amount: 260mm)
Rail length 300 mm, Single coarse/fine movement knob
TLS-414WSL3
(Stage surface:40㎜×40㎜ Travel amount: 260mm)
Rail length 300 mm, Double coarse/fine movement knob
TLS-414SL4
(Stage surface:40㎜×40㎜ Travel amount: 360mm)
Rail length 400 mm, Single coarse/fine movement knob
TLS-414WSL4
(Stage surface:40㎜×40㎜ Travel amount: 360mm)
Rail length 400 mm, Double coarse/fine movement knob
TLS-414SL5
(Stage surface:40㎜×40㎜ Travel amount: 460mm)
Rail length 500 mm, Single coarse/fine movement knob
TLS-414WSL5
(Stage surface:40㎜×40㎜ Travel amount: 460mm)
Rail length 500 mm, Double coarse/fine movement knob

Long-Distance Stage Blocks

Long-Distance Stage Blocks
  • X Axis
TBL-414
(Stage surface:40㎜×40㎜) Single knob
TBL-414W
(Stage surface:40㎜×40㎜) Double knob
TBL-414S
(Stage surface:40㎜×40㎜) Single coarse/fine movement knob
TBL-414WS
(Stage surface:40㎜×40㎜)
Double coarse/fine movement knob

Z Lift Stages

Z Lift Stage

Z Lift Stage
  • Z Axis
TLV-642-1
(Stage surface:60㎜×60㎜ Travel amount: 0〜10mm)
Standard type, Standard micrometer
TLV-947-1
(Stage surface:90㎜×90㎜ Travel amount: 0〜10mm)
Standard type, Standard micrometer

Lab Jacks Stage

Lab Jacks Stage
  • Z Axis
TLV-151-2
(Stage surface:125㎜×125㎜ Travel amount: 0〜40mm)
TLV-251-2
(Stage surface:150㎜×200㎜ Travel amount: 0〜70mm)

Z Stages

Z Stages
  • Z Axis
TLV-111
(Stage surface:40㎜×50㎜ Travel amount: 0〜60mm) Double knob
TLV-643
(Stage surface:60㎜×60㎜ Travel amount: ±12.5mm)
Double coarse/fine movement knob
TLV-143
(Stage surface:60㎜×115㎜ Travel amount: ±25mm)
Double coarse/fine movement knob
TLV-243
(Stage surface:60㎜×155㎜ Travel amount: ±37.5mm)
Double coarse/fine movement knob

Rotary Stages

Rotary Stage

Rotary Stage
  • Rotation
TRS-313
(Stage surface:φ30㎜ Travel amount: Coarse movement 360°) Standard micrometer
TRS-314T
(Stage surface:φ28㎜ Travel amount: Coarse movement 360°、fine movement ±1.5°)
Standard micrometer
TRS-317
(Stage surface:φ30㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
Standard micrometer
TRS-317-R
(Stage surface:φ30㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
Reversed micrometer position, Standard micrometer
TRS-612
(Stage surface:φ62㎜ Travel amount: Coarse movement 360°) Standard micrometer
TRS-917
(Stage surface:φ90㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
Standard micrometer
TRS-917-R
(Stage surface:φ90㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
Reversed micrometer position, Standard micrometer
TRS-112
(Stage surface:φ100㎜ Travel amount: Coarse movement 360°) Standard micrometer
TRS-117
(Stage surface:φ125㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
Standard micrometer
TRS-117-R
(Stage surface:φ125㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
Reversed micrometer position, Standard micrometer
TRS-147-1
(Stage surface:φ125㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
Standard micrometer
TRS-147-1R
(Stage surface:φ125㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
Reversed micrometer position, Standard micrometer
TRS-327
(Stage surface:φ30㎜ Travel amount: fine movement 360°) Standard micrometer
TRS-627
(Stage surface:φ60㎜ Travel amount: fine movement 360°) Standard micrometer
TRS-927
(Stage surface:φ90㎜ Travel amount: fine movement 360°) Standard micrometer
TRS-127
(Stage surface:φ125㎜ Travel amount: fine movement 360°) Standard micrometer
TRS-147-2
(Stage surface:φ125㎜ Travel amount: fine movement 360°) Standard micrometer
TRS-911T
(Stage surface:φ90㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
Standard micrometer
TRS-911T-R
(Stage surface:φ90㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
Reversed micrometer position, Standard micrometer
TRS-111T
(Stage surface:φ125㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
Standard micrometer
TRS-111T-R
(Stage surface:φ125㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
Reversed micrometer position, Standard micrometer
TRS-211T
(Stage surface:φ150㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
Standard micrometer
TRS-211T-R
(Stage surface:φ150㎜ Travel amount: Coarse movement 360°、fine movement ±5°)
Reversed micrometer position, Standard micrometer

Tilt Stages

Goniometer Stages

Goniometer Stages
  • Tilt Single
TTS-311
(Stage surface:30㎜×30㎜ Travel amount: ±15°)
TTS-312
(Stage surface:30㎜×30㎜ Travel amount: ±10°)
TTS-411
(Stage surface:40㎜×40㎜ Travel amount: ±20°)
TTS-412
(Stage surface:40㎜×40㎜ Travel amount: ±15°)
TTS-413
(Stage surface:40㎜×40㎜ Travel amount: ±10°)
TTS-611
(Stage surface:60㎜×60㎜ Travel amount: ±20°)
TTS-612
(Stage surface:60㎜×60㎜ Travel amount: ±15°)
TTS-613
(Stage surface:60㎜×60㎜ Travel amount: ±10°)
TTS-C411
(Stage surface:40㎜×40㎜ Travel amount: ±8°)
TTS-C412
(Stage surface:40㎜×40㎜ Travel amount: ±6°)
TTS-C413
(Stage surface:40㎜×40㎜ Travel amount: ±5°)
TTS-C611
(Stage surface:60㎜×60㎜ Travel amount: ±8°)
TTS-C612
(Stage surface:60㎜×60㎜ Travel amount: ±6°)
TTS-C613
(Stage surface:60㎜×60㎜ Travel amount: ±5°)
TTS-911
(Stage surface:90㎜×90㎜ Travel amount: ±12°)
TTS-912
(Stage surface:90㎜×90㎜ Travel amount: ±10°)
TTS-211
(Stage surface:60㎜×120㎜ Travel amount: ±20°)

2-Axis Goniometer Stages

2-Axis Goniometer Stages
  • Tilt Double
TTD-313
(Stage surface:30㎜×30㎜ Travel amount: Upper axes ±15°、lower axes ±10°)
TTD-411
(Stage surface:40㎜×40㎜ Travel amount: Upper axes ±20°、lower axes ±15°)
TTD-412
(Stage surface:40㎜×40㎜ Travel amount: Upper axes ±15°、lower axes ±10°)
TTD-614
(Stage surface:60㎜×60㎜ Travel amount: Upper axes ±15°、lower axes ±10°)
TTD-C411
(Stage surface:40㎜×40㎜ Travel amount: Upper axes ±8°、lower axes ±6°)
TTD-C412
(Stage surface:40㎜×40㎜ Travel amount: Upper axes ±6°、lower axes ±5°)
TTD-C611
(Stage surface:60㎜×60㎜ Travel amount: Upper axes ±8°、lower axes ±6°)
TTD-C612
(Stage surface:60㎜×60㎜ Travel amount: Upper axes ±6°、lower axes ±5°)
TTD-913
(Stage surface:90㎜×90㎜ Travel amount: Upper axes ±12°、lower axes ±10°)

Horizontal Goniometer Stages

Horizontal Goniometer Stages
  • Tilt Single
TTS-R411
(Stage surface:40㎜×40㎜ Travel amount: ±6°)
TTS-R412
(Stage surface:40㎜×40㎜ Travel amount: ±5°)
TTS-R611
(Stage surface:60㎜×60㎜ Travel amount: ±5°)
TTS-R612
(Stage surface:60㎜×60㎜ Travel amount: ±4.5°)
TTS-R911
(Stage surface:90㎜×90㎜ Travel amount: ±4°)
TTS-R912
(Stage surface:90㎜×90㎜ Travel amount: ±3.5°)

2-Axis Tilt Stages

2-Axis Tilt Stages
  • Tilt Double
TTD-302
(Stage surface:30㎜×30㎜ Travel amount: ±3°)
TTD-304
(Stage surface:30㎜×30㎜ Travel amount: ±2°)
TTD-602
(Stage surface:60㎜×60㎜ Travel amount: ±3°)
TTD-604
(Stage surface:60㎜×60㎜ Travel amount: ±2°)
TTD-902
(Stage surface:90㎜×90㎜ Travel amount: ±3°)
TTD-904
(Stage surface:90㎜×90㎜ Travel amount: ±2°)
TTD-104
(Stage surface:125㎜×125㎜ Travel amount: ±2°)

Tilt/Rotary Stages

Tilt Stage

Tilt Stage
  • Tilt Double
  • Rotation
TTD-605
(Stage surface:60㎜×60㎜ Travel amount: Tilt ±3°、 Rotary ±3°)
TTD-905
(Stage surface:90㎜×90㎜ Travel amount: Tilt ±3°、 Rotary ±3°)

YZ, XYZ Stages

YZ Stage

YZ Stage
  • YZ Axis
TLM-213-1
(Stage surface:60㎜×60㎜ Travel amount: Y axes 0〜35mm、Z axes 0〜25mm)
TLM-213-2
(Stage surface:60㎜×60㎜ Travel amount: Y axes 0〜35mm、Z axes 0〜25mm)

XYZ Stage

XYZ Stage
  • XYZ Axis
TLT-313
(Stage surface:30㎜×30㎜ Travel amount: XY axes ±5mm、Z axes 0〜5mm)
TLT-413
(Stage surface:40㎜×40㎜ Travel amount: XY axes ±5mm、Z axes 0〜10mm)
TLT-613
(Stage surface:60㎜×60㎜ Travel amount: XY axes ±10mm、Z axes 0〜20mm)
TLT-212-1CL
(Stage surface:76㎜×76㎜ Travel amount: XY axes ±25mm、Z axes 0〜30mm)
TLT-212-2CL
(Stage surface:76㎜×76㎜ Travel amount: XY axes ±25mm、Z axes 0〜30mm)
TLT-214-1
(Stage surface:76㎜×76㎜ Travel amount: XY axes ±25mm、Z axes 0〜50mm)
TLT-214-2
(Stage surface:76㎜×76㎜ Travel amount: XY axes ±25mm、Z axes 0〜50mm)
TLT-211-1
(Stage surface:25㎜×25㎜ Travel amount: ±30mm)
TLT-211-1CL
(Stage surface:25㎜×25㎜ Travel amount: ±30mm)

Motorized Stages

High-Grade Stages

X Stage

X Stage
  • X Axis
TALS-4011-G0M
(Stage surface:40㎜×40㎜ Travel amount: ±7.5mm) Standard type, Precision screw
TALS-4011-G1M
(Stage surface:40㎜×40㎜ Travel amount: ±7.5mm) Standard type, Ball screw
TALS-4011-G0M-R
(Stage surface:40㎜×40㎜ Travel amount: ±7.5mm) Symmetrical type, Precision screw
TALS-4011-G1M-R
(Stage surface:40㎜×40㎜ Travel amount: ±7.5mm) Symmetrical type, Ball screw
TALS-5012-G0M
(Stage surface:50㎜×50㎜ Travel amount: ±10mm) Standard type, Precision screw
TALS-5012-G1M
(Stage surface:50㎜×50㎜ Travel amount: ±10mm) Standard type, Ball screw
TALS-5012-G0M-R
(Stage surface:50㎜×50㎜ Travel amount: ±10mm) Symmetrical type, Precision screw
TALS-5012-G1M-R
(Stage surface:50㎜×50㎜ Travel amount: ±10mm) Symmetrical type, Ball screw
TALS-6012-G0M
(Stage surface:60㎜×60㎜ Travel amount: ±12.5mm) Standard type, Precision screw
TALS-6012-G1M
(Stage surface:60㎜×60㎜ Travel amount: ±12.5mm) Standard type, Ball screw
TALS-6012-G0M-R
(Stage surface:60㎜×60㎜ Travel amount: ±12.5mm) Symmetrical type, Precision screw
TALS-6012-G1M-R
(Stage surface:60㎜×60㎜ Travel amount: ±12.5mm) Symmetrical type, Ball screw
TALS-7013-G0M
(Stage surface:70㎜×70㎜ Travel amount: ±15mm) Standard type, Precision screw
TALS-7013-G1M
(Stage surface:70㎜×70㎜ Travel amount: ±15mm) Standard type, Ball screw
TALS-7013-G0M-R
(Stage surface:70㎜×70㎜ Travel amount: ±15mm) Symmetrical type, Precision screw
TALS-7013-G1M-R
(Stage surface:70㎜×70㎜ Travel amount: ±15mm) Symmetrical type, Ball screw

XY Stage

XY Stage
  • XY Axis
TALD-4011-G0M
(Stage surface:40㎜×40㎜ Travel amount: ±7.5mm) Standard type, Precision screw
TALD-4011-G1M
(Stage surface:40㎜×40㎜ Travel amount: ±7.5mm) Standard type, Ball screw
TALD-4011-G0M-R
(Stage surface:40㎜×40㎜ Travel amount: ±7.5mm) Symmetrical type, Precision screw
TALD-4011-G1M-R
(Stage surface:40㎜×40㎜ Travel amount: ±7.5mm) Symmetrical type, Ball screw
TALD-5012-G0M
(Stage surface:50㎜×50㎜ Travel amount: ±10mm) Standard type, Precision screw
TALD-5012-G1M
(Stage surface:50㎜×50㎜ Travel amount: ±10mm) Standard type, Ball screw
TALD-5012-G0M-R
(Stage surface:50㎜×50㎜ Travel amount: ±10mm) Symmetrical type, Precision screw
TALD-5012-G1M-R
(Stage surface:50㎜×50㎜ Travel amount: ±10mm) Symmetrical type, Ball screw
TALD-6012-G0M
(Stage surface:60㎜×60㎜ Travel amount: ±12.5mm) Standard type, Precision screw
TALD-6012-G1M
(Stage surface:60㎜×60㎜ Travel amount: ±12.5mm) Standard type, Ball screw
TALD-6012-G0M-R
(Stage surface:60㎜×60㎜ Travel amount: ±12.5mm) Symmetrical type, Precision screw
TALD-6012-G1M-R
(Stage surface:60㎜×60㎜ Travel amount: ±12.5mm) Symmetrical type, Ball screw
TALD-7013-G0M
(Stage surface:70㎜×70㎜ Travel amount: ±15mm) Standard type, Precision screw
TALD-7013-G1M
(Stage surface:70㎜×70㎜ Travel amount: ±15mm) Standard type, Ball screw
TALD-7013-G0M-R
(Stage surface:70㎜×70㎜ Travel amount: ±15mm) Symmetrical type, Precision screw
TALD-7013-G1M-R
(Stage surface:70㎜×70㎜ Travel amount: ±15mm) Symmetrical type, Ball screw

Z Stage

Z Stage
  • Z Axis
TALZ-4011-G0M
(Stage surface:40㎜×40㎜ Travel amount: ±7.5mm) Standard type, Precision screw
TALZ-4011-G1M
(Stage surface:40㎜×40㎜ Travel amount: ±7.5mm) Standard type, Ball screw
TALZ-4011-G0M-R
(Stage surface:40㎜×40㎜ Travel amount: ±7.5mm) Symmetrical type, Precision screw
TALZ-4011-G1M-R
(Stage surface:40㎜×40㎜ Travel amount: ±7.5mm) Symmetrical type, Ball screw
TALZ-5012-G0M
(Stage surface:50㎜×50㎜ Travel amount: ±10mm) Standard type, Precision screw
TALZ-5012-G1M
(Stage surface:50㎜×50㎜ Travel amount: ±10mm) Standard type, Ball screw
TALZ-5012-G0M-R
(Stage surface:50㎜×50㎜ Travel amount: ±10mm) Symmetrical type, Precision screw
TALZ-5012-G1M-R
(Stage surface:50㎜×50㎜ Travel amount: ±10mm) Symmetrical type, Ball screw
TALZ-6012-G0M
(Stage surface:60㎜×60㎜ Travel amount: ±12.5mm) Standard type, Precision screw
TALZ-6012-G1M
(Stage surface:60㎜×60㎜ Travel amount: ±12.5mm) Standard type, Ball screw
TALZ-6012-G0M-R
(Stage surface:60㎜×60㎜ Travel amount: ±12.5mm) Symmetrical type, Precision screw
TALZ-6012-G1M-R
(Stage surface:60㎜×60㎜ Travel amount: ±12.5mm) Symmetrical type, Ball screw
TALZ-7013-G0M
(Stage surface:70㎜×70㎜ Travel amount: ±15mm) Standard type, Precision screw
TALZ-7013-G1M
(Stage surface:70㎜×70㎜ Travel amount: ±15mm) Standard type, Ball screw
TALZ-7013-G0M-R
(Stage surface:70㎜×70㎜ Travel amount: ±15mm) Symmetrical type, Precision screw
TALZ-7013-G1M-R
(Stage surface:70㎜×70㎜ Travel amount: ±15mm) Symmetrical type, Ball screw

Rotary Stage

Rotary Stage
  • Rotation
TARS-4036-GM
(Stage surface:φ40㎜ Travel amount: 360°)
TARS-5036-GM
(Stage surface:φ50㎜ Travel amount: 360°)
TARS-6036-GM
(Stage surface:φ60㎜ Travel amount: 360°)
TARS-7036-GM
(Stage surface:φ70㎜ Travel amount: 360°)
TARS-6036-HM
(Stage surface:φ60㎜ Travel amount: 360°)

30mm x 30mm (φ30mm) Compact Stages

X Stage

X Stage
  • X Axis
TALS-301-HM
(Stage surface:30㎜×30㎜ Travel amount: ±7.5mm)

XY Stage

XY Stage
  • XY Axis
TALD-301-HM
(Stage surface:30㎜×30㎜ Travel amount: ±7.5mm)

Z Stage

Z Stage
  • Z Axis
TALZ-301-HM
(Stage surface:30㎜×30㎜ Travel amount: ±7.5mm)

Z Lift Stage

Z Lift Stage
  • Z Axis
TALV-3005-HM
(Stage surface:30㎜×30㎜ Travel amount: 0〜5mm)

Rotary Stage

Rotary Stage
  • Rotation
TARS-336-HM
(Stage surface:φ30㎜ Travel amount: 360°)

Cross Roller Stages

X,XY,Z,Rotary Stage

X Stage
  • X Axis
TALS-904-H1PC
(Stage surface:90㎜×90㎜ Travel amount: ±20mm)
TALS-106-H1PC
(Stage surface:125㎜×125㎜ Travel amount: ±30mm)
TALS-510-H1P
(Stage surface:150㎜×180㎜ Travel amount: ±50mm)
TALS-215-H1P
(Stage surface:200㎜×250㎜ Travel amount: ±75mm)

X,XY,Z,Rotary Stage

XY Stage
  • XY Axis
TALD-904-H1PC
(Stage surface:90㎜×90㎜ Travel amount: ±20mm)
TALD-106-H1PC
(Stage surface:125㎜×125㎜ Travel amount: ±30mm)
TALD-510-H1P
(Stage surface:150㎜×150㎜ Travel amount: ±50mm)
TALD-215-H1P
(Stage surface:200㎜×250㎜ Travel amount: ±75mm)

Z Stage

Z Stage
  • Z Axis
TALZ-904-H1P
(Stage surface:90㎜×90㎜ Travel amount: ±20mm)
TALZ-106-H1P
(Stage surface:125㎜×125㎜ Travel amount: ±30mm)
TALZ-510-H1P
(Stage surface:150㎜×180㎜ Travel amount: ±50mm)
TALZ-215-H1P
(Stage surface:200㎜×250㎜ Travel amount: ±75mm)

Rotary Stage

Rotary Stage
  • Rotation
TARS-936-HP
(Stage surface:φ90㎜ Travel amount: 360°)
TARS-136-HP
(Stage surface:φ125㎜ Travel amount: 360°)

Ball Bushing Stages

X Stage

X Stage
  • X Axis
TALS-604-E1P
(Stage surface:60㎜×60㎜ Travel amount: ±20mm)
TALS-906-E1P
(Stage surface:90㎜×90㎜ Travel amount: ±30mm)
TALS-115-E1P
(Stage surface:125㎜×125㎜ Travel amount: ±75mm)

XY Stage

XY Stage
  • XY Axis
TALD-604-E1P
(Stage surface:60㎜×60㎜ Travel amount: ±20mm)
TALD-906-E1P
(Stage surface:90㎜×90㎜ Travel amount: ±30mm)
TALD-115-E1P
(Stage surface:125㎜×125㎜ Travel amount: ±75mm)

Z Stage

Z Stage
  • Z Axis
TALZ-604-E1P
(Stage surface:60㎜×60㎜ Travel amount: ±20mm)
TALZ-906-E1P
(Stage surface:90㎜×90㎜ Travel amount: ±30mm)
TALZ-115-E1P
(Stage surface:125㎜×125㎜ Travel amount: ±75mm)

High-Precision/High-Rigidity Stages

X Stage

X Stage
  • X Axis
TALS-903-H1S
(Stage surface:90㎜×100㎜ Travel amount: ±15mm)
TALS-105-H1S
(Stage surface:125㎜×160㎜ Travel amount: ±25mm)
TALS-510-H1S
(Stage surface:150㎜×200㎜ Travel amount: ±50mm)

XY Stage

XY Stage
  • XY Axis
TALD-903-H1S
(Stage surface:90㎜×100㎜ Travel amount: ±15mm)
TALD-105-H1S
(Stage surface:125㎜×160㎜ Travel amount: ±25mm)
TALD-510-H1S
(Stage surface:150㎜×200㎜ Travel amount: ±50mm)

Z Stage

Z Stage
  • Z Axis
TALZ-903-H1S
(Stage surface:90㎜×100㎜ Travel amount: ±15mm)
TALZ-105-H1S
(Stage surface:125㎜×160㎜ Travel amount: ±25mm)
TALZ-510-H1S
(Stage surface:150㎜×200㎜ Travel amount: ±50mm)

Z Lift Stages

Z Lift Stage

Z Lift Stage
  • Z Axis
TALV-600C-H0M
(Stage surface:60㎜×60㎜ Travel amount: 0〜5mm) Precision screw
TALV-600C-H1M
(Stage surface:60㎜×60㎜ Travel amount: 0〜5mm) Ball screw
TALV-901-HP
(Stage surface:90㎜×90㎜ Travel amount: 0〜10mm)
TALV-902-HP
(Stage surface:90㎜×90㎜ Travel amount: 0〜20mm)
TALV-102-HP
(Stage surface:125㎜×125㎜ Travel amount: 0〜20mm)
TALV-104-HP
(Stage surface:125㎜×125㎜ Travel amount: 0〜40mm)

Tilt Stages

Tilt Stage

Tilt Stages
  • Tilt Single
TATS-C416C-HM
(Stage surface:40㎜×40㎜ Travel amount: ±8°)
TATS-C412C-HM
(Stage surface:40㎜×40㎜ Travel amount: ±6°)
TATS-C410C-HM
(Stage surface:40㎜×40㎜ Travel amount: ±5°)
TATS-C616C-HM
(Stage surface:60㎜×60㎜ Travel amount: ±8°)
TATS-C612C-HM
(Stage surface:60㎜×60㎜ Travel amount: ±6°)
TATS-C610C-HM
(Stage surface:60㎜×60㎜ Travel amount: ±5°)
TATS-9030-HP
(Stage surface:90㎜×90㎜ Travel amount: ±15°)
TATS-9020-HP
(Stage surface:90㎜×90㎜ Travel amount: ±10°)
TATS-1220-HP
(Stage surface:125㎜×125㎜ Travel amount: ±10°)
TATS-1230-HP
(Stage surface:125㎜×125㎜ Travel amount: ±15°)

2-Axis Tilt Stage

2-Axis Tilt Stages
  • Tilt Double
TATD-C412C-HM
(Stage surface:40㎜×40㎜ Travel amount: Upper axis ±8°/ lower axis ±6°)
TATD-C410C-HM
(Stage surface:40㎜×40㎜ Travel amount: Upper axis ±6°/ lower axis ±5°)
TATD-C612C-HM
(Stage surface:60㎜×60㎜ Travel amount: Upper axis ±8°/ lower axis ±6°)
TATD-C610C-HM
(Stage surface:60㎜×60㎜ Travel amount: Upper axis ±6°/ lower axis ±5°)
TATD-9020-HP
(Stage surface:90㎜×90㎜ Travel amount: Upper axis ±15°/ lower axis ±10°)
TATD-1220-HP
(Stage surface:125㎜×125㎜ Travel amount: Upper axis ±15°/ lower axis ±10°)

Micro Scanning Stages

XY Stage

XY Stage
  • XY Axis
TMSS-50C-OA
(Stage surface:155㎜×155㎜ Travel amount: ±25mm)
TMSS-50C-OB
(Stage surface:155㎜×155㎜ Travel amount: ±25mm)
TMSS-50C-NA
(Stage surface:155㎜×155㎜ Travel amount: ±25mm)
TMSS-50WC-OA
(Stage surface:205㎜×155㎜ Travel amount: X axis ±50mm、Y axis ±25mm)
TMSS-50WC-OB
(Stage surface:205㎜×155㎜ Travel amount: X axis ±50mm、Y axis ±25mm)
TMSS-50WC-NA
(Stage surface:205㎜×155㎜ Travel amount: X axis ±50mm、Y axis ±25mm)
TMSS-100C
(Stage surface:205㎜×183㎜ Travel amount: ±50mm)
TMSS-150C
(Stage surface:280㎜×230㎜ Travel amount: ±75mm)
TMSS-150C-OA
(Stage surface:280㎜×230㎜ Travel amount: ±75mm)
TMSS-150C-NA
(Stage surface:280㎜×230㎜ Travel amount: ±75mm)
TMSS-150C-NB
(Stage surface:280㎜×230㎜ Travel amount: ±75mm)
TMSS-150C-NC
(Stage surface:280㎜×230㎜ Travel amount: ±75mm)
TMSS-200C
(Stage surface:355㎜×305㎜ Travel amount: ±100mm)
TMSS-200C-NA
(Stage surface:355㎜×305㎜ Travel amount: ±100mm)
TMSS-300C
(Stage surface:460㎜×405㎜ Travel amount: ±150mm)
TMSS-300C-NA
(Stage surface:460㎜×405㎜ Travel amount: ±150mm)